Thinner

An appropriate thinner can be applied to achieve a lower film thickness upon spin coating compared to the original polymer formulation.

Developer

The developer can be applied to remove uncured or non-exposed polymer material by wet-chemical development.

Adhesion Promoter

The hybrid polymer materials require an adhesion promoter, also called primer, to get a good substrate adhesion during the UV imprint or UV molding process.

 

The table contains summarized information on recommended process chemicals for hybrid polymers.

Detailed information can be found in the processing guidelines.

Purpose Ancillaries Features
Adhesion Promoter OrmoPrime®08

- Recommended for various substrates like Si, glass, and quartz
- Ready-to-use solution for spin coating
- Film thickness 130 nm

Dilution of Hybrid Polymers *

OrmoThin
ma-T 1050

OrmoThin - Dilution for d > 0.5 μm (product-dependent) * 
ma-T 1050 - Dilution for d < 0.5 μm (product-dependent) *

Developer OrmoDev

- Removal of uncured material (e.g. after mask lithography was applied)
- Immersion development

* For details of dilution ratios see corresponding processing guidelines 

OrmoComp®: DE 30 210 075 433; IR 1 091 982 ; TW 100030626; OrmoClear®: DE 30 210 075 434; IR 1 091 359 ; TW 100030628; OrmoStamp®: DE 30 210 075 435; IR 1 092 621 ; TW 100030629; OrmoPrime®: DE 30 210 075 436