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info@microresist.de

Unique Features

  • UV-curable, solvent based inks
  • Low viscosities
  • Compatible to standard inkjet-printing devices
  • Excellent thermal, mechanical and chemical stability of cured patterns
  • High transparency to near UV and visible light

Applications

  • Single micro-lenses and micro-lens arrays
  • Waveguides and microfluidic devices
  • Spacers and protecting layers
  • Glue for bonding applications
  • Large-area substrate processing
InkEpo series - UV curable material for inkjet-printing
Ink InkEpo 5 mPas InkEpo 8 mPas InkEpo 12 mPas InkEpo 25 mPas
dyn. Viscosity [mPas]

(@ 25°C, 1000 s-1)

5.0 8.0 12 25
Substrate preparation Option 1: Dehydration bake at 200 °C for 5 min on a hotplate or for 30 min in an oven. Alternatively oxygen plasma can be applied.
Option 2: Hydrophobic surface pre-treatment.
Ink-jet parameters Piezo-actuated nozzle with a size of e.g. 30 μm, 50 μm or 70 μm
Room temperature, up to 70 °C possible
Prebake 80 - 90 °C
Spectral Sensitivity i-line - 365nm
Exposure Dose

@ 365 nm 

UV mercury lamp (broadband exposure), UV-LED

500 - 1.500 mJ/cm2
Post exposure bake (PEB) 90 - 100 °C
Hardbake 100 - 140 °C (optional)
Remover mr-Rem 700 (NMP & NEP free)

mr-Rem 500 (NMP free)

O2-Plasma

Recommended process chemicals:
Thinner no thinner available
Developer not required 
Remover mr-Rem 700 (NMP & NEP free)

mr-Rem 500 (NMP free)

O2-plasma

quotation request

Inkjet Materials
Blog_funktional_materials_by_inkjetprinting_Voigt_
Functional Materials for Inkjet-printing
micro resist technology offers functional materials for Inkjet-printing. The materials have been specially designed to exhibit a good compatibility to a broad range of inkjet printing tools. The portfolio involves two classes of products providing ideal solutions for the manufacture of micro and nano optical components or functional films. InkOrmo and InkEpo exhibit excellent optical properties as well as high chemical, mechanical and thermal stability. mr-UVCur26SF is solvent-free material which has been specifically designed for nanoimprint lithography (NIL).
Inkjet Materials
Inkjet-printing
3D microstructures
Nano and micro electronics
Wire-grid polarizers
Diffractive optical elements (DOE)
Organic electronics
InkOrmo series
InkEpo series
mr-UVCur26SF series
30. Juni 2020

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