{"id":12038,"date":"2023-05-22T15:40:27","date_gmt":"2023-05-22T13:40:27","guid":{"rendered":"https:\/\/microresist.de\/?post_type=tech-blogs-micro&p=12038"},"modified":"2023-05-24T11:37:29","modified_gmt":"2023-05-24T09:37:29","slug":"combined-uv-e-beam-lithography-patterning-in-a-mix-match-approach-in-negative-resists","status":"publish","type":"tech-blogs-micro","link":"https:\/\/microresist.de\/en\/tech-blogs-micro\/combined-uv-e-beam-lithography-patterning-in-a-mix-match-approach-in-negative-resists\/","title":{"rendered":"Combined UV & e-beam lithography patterning in a mix & match approach in negative resists"},"content":{"rendered":"","protected":false},"template":"","class_list":["post-12038","tech-blogs-micro","type-tech-blogs-micro","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/microresist.de\/en\/wp-json\/wp\/v2\/tech-blogs-micro\/12038","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/microresist.de\/en\/wp-json\/wp\/v2\/tech-blogs-micro"}],"about":[{"href":"https:\/\/microresist.de\/en\/wp-json\/wp\/v2\/types\/tech-blogs-micro"}],"version-history":[{"count":0,"href":"https:\/\/microresist.de\/en\/wp-json\/wp\/v2\/tech-blogs-micro\/12038\/revisions"}],"wp:attachment":[{"href":"https:\/\/microresist.de\/en\/wp-json\/wp\/v2\/media?parent=12038"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}