{"id":7423,"date":"2001-01-02T17:18:56","date_gmt":"2001-01-02T16:18:56","guid":{"rendered":"https:\/\/microresist.de\/tech-blogs-micro\/herstellung-von-sub-%c2%b5m-strukturen-mittels-tief-uv-lithographie-mit-ma-n-2400\/"},"modified":"2022-01-31T14:40:52","modified_gmt":"2022-01-31T13:40:52","slug":"herstellung-von-sub-%c2%b5m-strukturen-mittels-tief-uv-lithographie-mit-ma-n-2400","status":"publish","type":"tech-blogs-micro","link":"https:\/\/microresist.de\/en\/tech-blogs-micro\/herstellung-von-sub-%c2%b5m-strukturen-mittels-tief-uv-lithographie-mit-ma-n-2400\/","title":{"rendered":"Fabrication of sub-\u00b5m-patterns by Deep UV lithography using ma-N 2400"},"content":{"rendered":"","protected":false},"template":"","class_list":["post-7423","tech-blogs-micro","type-tech-blogs-micro","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/microresist.de\/en\/wp-json\/wp\/v2\/tech-blogs-micro\/7423","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/microresist.de\/en\/wp-json\/wp\/v2\/tech-blogs-micro"}],"about":[{"href":"https:\/\/microresist.de\/en\/wp-json\/wp\/v2\/types\/tech-blogs-micro"}],"version-history":[{"count":0,"href":"https:\/\/microresist.de\/en\/wp-json\/wp\/v2\/tech-blogs-micro\/7423\/revisions"}],"wp:attachment":[{"href":"https:\/\/microresist.de\/en\/wp-json\/wp\/v2\/media?parent=7423"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}