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Quality Management

Our company operates an integrated Quality and Environmental Management System, which forms the foundation for sustainable and customer-focused corporate management. The Quality Management System in accordance with DIN EN ISO 9001 has been successfully certified since 1997, and the Environmental Management System in accordance with DIN EN ISO 14001 since 2011. Both management systems support us in continuously improving the quality of our products and services, using resources responsibly, and ensuring the long-term success of the company.

You can download our current DIN EN ISO 9001 certificate here:

Quality Policy of micro resist technology GmbH

As a subsidiary of the TOK Group, micro resist technology GmbH operates as an independent player in national and international technology markets, including microelectronics and nanoelectronics, microphotonics and nanophotonics, microsystems technology, micro-optics, microfluidics, and microsensor technologies based on semiconductor technology.

As a research-driven and technology-oriented company, we align our activities with the principles of the Business Excellence Model. Our Quality Policy is based on the following principles:

Customer Focus – External and Internal

Customer focus means aligning business decisions with our customers and their needs. It is a fundamental component of our quality management system and a key driver of innovation.

Customer focus includes the continuous monitoring of customer satisfaction, the alignment of product development with market trends and customer requirements, the development of technologies that create competitive differentiation, and the ongoing improvement of products, services, and processes.

Our commitment to guaranteeing customers a consistent and reproducible quality of manufactured products drives all of our process innovation activities.

Improving customer satisfaction is regarded as a guiding principle for all business processes throughout the company, with the objective of achieving a high level of customer loyalty and long-term business relationships.

Compliance – Sustainable Business Relationships

Fairness, appreciation, and mutual respect are essential pillars of both our business activities and our understanding of human interaction. Fraud, corruption, and unfair business practices are not tolerated under any circumstances. Our company is committed to ethical principles and compliance with all applicable laws and regulations.

We cultivate sustainable and trust-based relationships with our customers and business partners. We contribute a high level of technical expertise to customer interactions and maintain solution-oriented dialogue.

Goal-Oriented Leadership

For the Management Board, goal-oriented leadership means:

  1. Managing financial performance, improving business results, and achieving sustainable customer enthusiasm in order to generate growth.
  2. Achieving sustainable growth through excellent products, continuously increasing revenues, and successful positioning in innovative future markets.
  3. Shaping the future together with all employees in an authentic and trustworthy environment supported by a highly innovative management and accountability system.
  4. Integrating micro resist technology GmbH into the international corporate structure of the TOK Group.

A clear, future-oriented strategy enables the company to grow and realize its vision and mission. We consider clarity and transparency regarding jointly defined corporate objectives to be essential elements of effective corporate governance. Clear objectives are the foundation for precise positioning and strategy development, facilitate effective organizational structures, and support the implementation of standards.

Involvement of All Employees

Healthy and satisfied employees are the foundation of high-performing value-creation processes.

Employees are actively involved in the design and improvement of company processes. Their ideas, suggestions, and recommendations regarding products, processes, working conditions, and production environments provide valuable impulses for continuous development. We actively promote entrepreneurial thinking and behavior among our employees.

Leadership positions are developed with a long-term perspective. Women in leadership roles represent a significant asset to our company.

Management is committed to fostering long-term employment relationships, actively integrating both younger and more experienced employees into the workforce, and supporting a healthy work-life balance.

Strong Supplier Relationships

Strategic, long-term, and trust-based partnerships with suppliers ensure the timely delivery of raw materials and enable delivery-oriented, reproducible manufacturing processes that support customer-focused product quality.

Process-Oriented Approach

All business processes are designed with a focus on customer requirements and results while ensuring product quality and reproducibility. Process owners, process managers, and department heads are responsible for achieving planned outcomes and objectives.

System-Oriented Management

Individual processes and their interactions are systematically and effectively coordinated to achieve corporate objectives, improve process efficiency, and strengthen the company’s risk management capabilities.

Decision-Making Based on Key Performance Indicators

The continuous use of performance metrics across all business areas ensures informed management and decision-making processes based on data analysis and trend evaluation.

Continual Improvement

micro resist technology GmbH is committed to the continual improvement of the effectiveness of its quality management system. We continuously adapt to evolving customer requirements, market developments, and geopolitical changes in order to maintain our competitiveness.

Management actively supports improvement initiatives through the regular review of customer requirements related to products, services, and support, personal commitment, and the establishment of appropriate priorities.

Our high-quality standards are achieved through:

Strong sensitivity to customer expectations and market requirements,

  • A balanced and productive interaction between innovation, manufacturing, and service,
  • The consistent establishment of strategic partnerships and networks,
  • Intensive and structured internal and external communication, as well as interdisciplinary teamwork.

The clear definition and ownership of quality objectives for products and services form the basis for successful continuous improvement within the company. Therefore, specific and measurable quality objectives are established and implemented each year through a transparent management process.

Berlin; August 20, 2026

Motoko Samezawa
Managing Director and President

Dr. Arne Schleunitz
Chief Technology Officer (CTO)

Mirjam Henschel
Chief Operating Officer (COO)

Contact us.

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Resist Alliance

micro resist technology is a single entry point for specialty chemicals used in micro and nano manufacturing in Europe. The portfolio of in-house products is complemented by the strategic sales of associated products that are manufactured by our international partners. Here we act as a high-service distributor and offer European medium-sized companies a wide range of complementary products from a single source, which can be used for both established and innovative production and manufacturing processes.

Kayaku Advanced Materials, Inc. (formerly MicroChem Corp.)

We offer photoresists and specialty chemicals for MEMS and microelectronic applications from our partner Kayaku Advanced Materials, with whom we have been working for more than 20 years.

DJ MicroLaminates, Inc.

We offer dry film resists for MEMS, microfluidics and packaging applications from our partner DJ MicroLaminates, with whom we have been cooperating for over two years.

Dry Films

Dry films are ready-to-use polymer films as laminate foil with a high accuracy of the film thickness and excellent adhesion behaviour on various substrates. They are very simple in handling, photo-structurable and both as cut sheets and as roll material available.

  • Available in different film thicknesses
  • UV-crosslinking as negative photoresist
  • Feasibility of high aspect ratios
  • Vertical sidewalls
  • Multi lamination possible – up to 6 layer  complex multi-layer designs
  • High chemical resilience

 

  • Application as permanent material for optical application (e.g. lenses, wave guides …), in micro fluidics

Functional materials for inkjet-printing

Special designed functional materials from the product groups Hybrid Polymers, Photoresists, and Nanoimprint Polymers for the deposition and alternative patterning using inkjet printing process

  • Available in different viscosities (adjustable)
  • Suitable in commercial inkjet printing devices
  • Focused on high reliability of droplet generation
  • UV-curable formulations

 

  • Usable as a permanent material for optical application (e.g. lenses, wave guides, optical couplers, diffractive elements, …)
  • Packaging material in the micro electronic
  • Deposition / patterning on substrates with surface topography
  • Imprint material for nano-structuring with high dose accuracy

Nanoimprint Resists

Nanoimprint Lithography (NIL) is a straight forward, low cost, and high throughput capable technology for the fabrication of nanometer scaled patterns. Main application fields are photonics, next generation electronics, as well as bio- and sensor applications.

micro resist technology GmbH has provided tailor-made resist formulations for nanoimprint lithography (NIL) since 1999. The unique key features of our products are outstanding film forming and imprinting performance beside excellent pattern fidelity and plasma etch stability. Besides our highly innovative material developments in close contact to industrial needs, our strength is the ability to adjust our materials in film thickness as well as addressing certain needs of the specific use cases within the formulation. Our nanoimprint resists are mostly applied as an etch mask for pattern transfer into various substrates, like Si, SiO2, Al or sapphire.

Our portfolio covers materials for the classical thermal NIL (T-NIL), in which a thermoplastic polymer is used, as well as UV-NIL, in which a liquid formulation is photo crosslinked upon photo exposure. With our technological expertise and know-how we are able to find the right material for your process and applications. Please contact us for your technical support!

Hybrid Polymers

micro resist technology offers a broad portfolio of UV-curable hybrid polymer products for micro-optical applications. Their excellent optical transparency and high thermal stability makes them perfectly suitable for the production of polymer-based optical components and waveguides. The main fields of application are micro lenses, diffractive optical elements (DOE), gratings, and single-mode or multi-mode waveguides.

OrmoComp®: DE 30 210 075 433; IR 1 091 982 ; TW 100030626; OrmoClear®: DE 30 210 075 434; IR 1 091 359 ; TW 100030628; OrmoStamp®: DE 30 210 075 435; IR 1 092 621 ; TW 100030629; OrmoPrime®: DE 30 210 075 436

Positive Photoresists

Positive Photoresists for UV lithography (mask aligner, laser, greyscale exposure) and e-beam lithography

  • Variety of viscosities for 0.1 µm – 60 µm film thickness in one spin-coating step
  • Effective for broadband, g-line, h-line or i-line exposure, laser direct writing at 350…450 nm and e-beam lithography
  • No post exposure bake
  • Easy removal
     
  • For pattern transfer: Etch mask, mould for electroplating, mould for UV moulding
  • Use in microsystems technology, microelectronics, micro-optics – manufacture of e.g. MEMS, LEDs, ICs, MOEMS, fiber optics telecommunications devices, flat panel displays

Negative Photoresists

Photoresists for UV (mask aligner, laser)/ DUV and e-beam lithography

  • Effective for broadband and i-line, Deep UV, e-beam exposure, or laser direct writing @ 405 nm
  • Lift-off resists with tunable pattern profile, high temperature stability up to 160 °C
  • Variety of viscosities for different film thicknesses in one spin-coating step
     
  • For pattern transfer: Physical vapour deposition (PVD) and single  layer lift-off, etch mask, mould for electroplating
  • For permanent applications: Polymeric waveguides
  • Use in microsystems technology, microelectronics, micro-optics  – manufacture of e.g. LEDs, ICs, MEMS, flat panel displays, fiber optics telecommunications devices